Silicon nitride biaxial pointing mirrors with stiffening ribs

Silicon nitride biaxial pointing mirrors with stiffening ribs

著者名:

Kaiser,T.J. ( Montana State Univ./Bozeman )
Lutzenberger,B.J.
Friholm,R.A.
Himmer,P.A.
Dickensheets,D.L.

掲載資料名:

MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4561

発行年:

2001

開始ページ:

276

終了ページ:

282

総ページ数:

7

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819442895 [0819442895]

言語:

英語

請求記号:

P63600/4561

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012275
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : MOEMS and Miniaturized Systems
回次:	2001 : 2nd
会議開催地:	San Francisco, CA, USA
会議開催年:	2001.10.22-2001.10.24

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