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Vertical stiffening members for flatness control of surface-micromachined structures

著者名:
掲載資料名:
MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4561
発行年:
2001
開始ページ:
238
終了ページ:
246
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442895 [0819442895]
言語:
英語
請求記号:
P63600/4561
資料種別:
国際会議録

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