Vertical stiffening members for flatness control of surface-micromachined structures
- 著者名:
- Lutzenberger,B.J. ( Montana State Univ./Bozeman )
- Dickensheets,D.L.
- 掲載資料名:
- MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4561
- 発行年:
- 2001
- 開始ページ:
- 238
- 終了ページ:
- 246
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442895 [0819442895]
- 言語:
- 英語
- 請求記号:
- P63600/4561
- 資料種別:
- 国際会議録
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11
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