Single-layer silicon-on-insulator MEMS gyroscope for wide dynamic range and harsh environment applications

Single-layer silicon-on-insulator MEMS gyroscope for wide dynamic range and harsh environment applications

著者名:

Kranz,M.S. ( Morgan Research Corp. )

掲載資料名:

MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4559

発行年:

2001

開始ページ:

5

終了ページ:

16

総ページ数:

12

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819442871 [0819442879]

言語:

英語

請求記号:

P63600/4559

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012273
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication
回次:	2001
会議開催地:	San Francisco, CA, USA
会議開催年:	2001.01.22-2001.01.23

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