Failure analysis of radio frequency (rf) micro-electro-mechanical systems (MEMS)
- 著者名:
Walraven,J.A. ( Sandia National Labs. ) Cole Jr.,E.I. Sloan,L.R. Hietala,S.L. Tigges,C.P. Dyck,C.W. - 掲載資料名:
- Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4558
- 発行年:
- 2001
- 開始ページ:
- 254
- 終了ページ:
- 259
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442864 [0819442860]
- 言語:
- 英語
- 請求記号:
- P63600/4558
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
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SPIE - The International Society of Optical Engineering |
3
国際会議録
Backside preparation and failure analysis for packaged microelectromechanical systems (MEMS)
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |