Physical and reliability issues in MEMS microrelays with gold contacts
- 著者名:
- Lafontan,X. ( Ctr. National d'Etudes Spatiales )
- Pressecq,F.
- Perez,G.
- Dufaza,C.
- Karam,J.-M.
- 掲載資料名:
- Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4558
- 発行年:
- 2001
- 開始ページ:
- 11
- 終了ページ:
- 21
- 総ページ数:
- 11
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442864 [0819442860]
- 言語:
- 英語
- 請求記号:
- P63600/4558
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
"Concepts, characterization, and modeling of MEMS microswitches with gold contacts in MUMPs"
SPIE-The International Society for Optical Engineering |
American Institute of Aeronautics and Astronautics |
SPIE - The International Society for Optical Engineering |
American Institute of Aeronautics and Astronautics |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |