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Design for reliability of MEMS/MOEMS for lightwave telecommunications

著者名:
Arney,S. ( Lucent Technologies/Bell Labs. )
Aksyuk,V.A.
Bishop,D.J.
Bolle,C.A.
Frahm,R.E.
Gasparyan,A.
Giles,C.R.
Goyal,S.
Pardo,F.
Shea,H.R.
Lin,M.T.
White,C.D.
さらに 7 件
掲載資料名:
Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4558
発行年:
2001
開始ページ:
6
終了ページ:
10
総ページ数:
5
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442864 [0819442860]
言語:
英語
請求記号:
P63600/4558
資料種別:
国際会議録

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