Fabrication of highly sensitive thermal microflow sensor with surface-micromachined vacuum platform for gas and liquid applications
- 著者名:
- Jun,C.-H. ( Electronics and Telecommunications Research Institute )
- Choi,C.-A.
- Jang,W.I.
- Kim,Y.T.
- 掲載資料名:
- Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4557
- 発行年:
- 2001
- 開始ページ:
- 415
- 終了ページ:
- 422
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442857 [0819442852]
- 言語:
- 英語
- 請求記号:
- P63600/4557
- 資料種別:
- 国際会議録
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8
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Formation of low-stress multilayered thick polysilicon films for fabrication of microsystems
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