Young's modulus measurement of aluminum thin film with cantilever structure
- 著者名:
- 掲載資料名:
- Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4557
- 発行年:
- 2001
- 開始ページ:
- 225
- 終了ページ:
- 232
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442857 [0819442852]
- 言語:
- 英語
- 請求記号:
- P63600/4557
- 資料種別:
- 国際会議録
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5
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Characterization of AlF3 thin films in the ultraviolet by magnetron sputtering of aluminum target
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