Gold damascene interconnect technology for millimeter-wave photonics on silicon

Gold damascene interconnect technology for millimeter-wave photonics on silicon

著者名:

Ishii,H. ( NTT Telecommunications Energy Labs. )

掲載資料名:

Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4557

発行年:

2001

開始ページ:

210

終了ページ:

219

総ページ数:

10

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819442857 [0819442852]

言語:

英語

請求記号:

P63600/4557

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012271
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Micromachining and Microfabrication Process Technology
回次:	2001 : 7th
会議開催地:	San Francisco, CA, USA
会議開催年:	2001.10.22-2001.10.24

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