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Silicon micromechanical sensors model of piezoresistivity

著者名:
Lysko,J.M. ( Institute of Electron Technology )  
掲載資料名:
Optoelectronic and Electronic Sensors IV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4516
発行年:
2000
開始ページ:
1
終了ページ:
9
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442390 [0819442399]
言語:
英語
請求記号:
P63600/4516
資料種別:
国際会議録

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