Current status of ASET-HIT EUV phase-shifting point diffraction interferometer

Current status of ASET-HIT EUV phase-shifting point diffraction interferometer

著者名:

Gomel,Y. ( Association of Super-Advanced Electronics Tecnology )

掲載資料名:

Soft X-ray and EUV imaging systems II : 31 July-1 August 2001, San Diego, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4506

発行年:

2001

開始ページ:

39

終了ページ:

45

総ページ数:

7

出版情報:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819442208 [0819442208]

言語:

英語

請求記号:

P63600/4506

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012220
シリーズID:	PA00000029
会議名:	Optics & Photonics : Soft X-ray and EUV imaging systems
回次:	2001 : 2nd
会議開催地:	San Diego, CA, USA
会議開催年:	2001.07.31-2001.08.01

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