Upgrades to the NIST/DARPA EUV reflectometry facility

Upgrades to the NIST/DARPA EUV reflectometry facility

著者名:

Tarrio,C. ( National Institute of Standards and Technology )

掲載資料名:

Soft X-ray and EUV imaging systems II : 31 July-1 August 2001, San Diego, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4506

発行年:

2001

開始ページ:

32

終了ページ:

38

総ページ数:

7

出版情報:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819442208 [0819442208]

言語:

英語

請求記号:

P63600/4506

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012220
シリーズID:	PA00000029
会議名:	Optics & Photonics : Soft X-ray and EUV imaging systems
回次:	2001 : 2nd
会議開催地:	San Diego, CA, USA
会議開催年:	2001.07.31-2001.08.01

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2 国際会議録 EUV testing of multilayer mirrors: critical issues [6151-15] Hill, S. B., Ermanoski, I., Grantham, S., Tarrio, C., Lucatorto, T. B., Madey, T. E., Bajt, S., Chandhok, M., Yan, P., … SPIE - The International Society of Optical Engineering	8 国際会議録 NIST programs for calibrations in the far-ultraviolet spectral region Vest,R.E., Canfield,L.R., Furst,M.L., Graves,R.M., Hamilton,A.D., Hughey,L.R., Lucatorto,T.B., Madden,R.P. SPIE - The International Society for Optical Engineering
3 国際会議録 New infrared beamline at the NIST SURF II storage ring Hight Walker,A.R., Arp,U., Fraser,G.T., Lucatorto,T.B., Wen,J. SPIE-The International Society for Optical Engineering	9 国際会議録 Scaling studies of capping layer oxidation by water exposure with EUV radiation and electrons Clift, W.M., Klebanoff, L.E., Tarrio, C., Grantham, S., Wood, O.R., II, Wurm, S., Edwards, N.V. SPIE - The International Society of Optical Engineering
4 国際会議録 Vibration non-sensitive lithographic system for writing individualized holograms for data storage and security applications Grantham, S., Hill, S. B., Tarrio, C., Vest, R. E., Lucatorto, T. B. SPIE - The International Society of Optical Engineering	10 国際会議録 Quantitative measurement of outgas products from EUV photoresists C. Tarrio, B. A. Benner, R. E. Vest, S. Grantham, S. B. Hill Society of Photo-optical Instrumentation Engineers
5 国際会議録 PHOTOEMISSION MEASUREMENTS OF PHOTOCATHODE MATERIALS IN THE 115-400 A RANGE Grantham, S., Richardson, M. C., Watts, R., Lucatorto, T., Tarrio, C., Pollack, F. MRS - Materials Research Society	11 国際会議録 Design and performance of capping layers for EUV multilayer mirrors Bajt, S., Chapman, H.N., Nguyen, N., Alameda, J.B., Robinson, J.C., Malinowski, M.E., Gullikson, E., Aquila, A., Tarrio, … SPIE-The International Society for Optical Engineering
6 国際会議録 Critical parameters influencing the EUV-induced damage of Ru-capped multilayer mirrors S. B. Hill, I. Ermanoski, C. Tarrio, T. B. Lucatorto, T. E. Madey, S. Bajt, M. Fang, M. Chandhok SPIE - The International Society of Optical Engineering	12 国際会議録 Narrow-band EUV multilayer coating for the MOSES sounding rocket [5900-03] Owens, S. M., Gum, J. S., Tarrio, C., Grantham, S., Dvorak, J., Kjornrattanawanich, B., Keski-Kuha, R., Thomas, R. J., … SPIE - The International Society of Optical Engineering

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