Phase gratings made with inductively coupled plasma technology
- 著者名:
- 掲載資料名:
- Photonic Devices and Algorithms for Computing III
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4470
- 発行年:
- 2001
- 開始ページ:
- 138
- 終了ページ:
- 145
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441843 [0819441848]
- 言語:
- 英語
- 請求記号:
- P63600/4470
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
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SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
国際会議録
Etching analysis of inductively coupled plasma technology for fabrication of micro-optical elements
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |