Blank Cover Image

Effects of nitrogen plasma immersion ion implantation in silicon

著者名:
掲載資料名:
Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001, San Diego, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4468
発行年:
2001
開始ページ:
131
終了ページ:
139
総ページ数:
9
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441829 [0819441821]
言語:
英語
請求記号:
P63600/4468
資料種別:
国際会議録

類似資料:

1 国際会議録 Characterization of Damage Produced by Argon Plasma Immersion Ion Implantation in Crystalline Silicon

Rajkumar, Kumar, Mukesh, George, P.J., Chari, K.S., Mukherjee, S.

SPIE-The International Society for Optical Engineering
7 国際会議録 Formation of Buried Porous Silicon Structure by Hydrogen Plasma Immersion Ion Implantation

Fan, Z., Chu, Paul K., Lu, X., Iyer, S. S. K., Cheung, N. W.

MRS - Materials Research Society
2 国際会議録 Diffusion barrier layer fabrication by plasma immersion ion implantation

Kumar, M., Rajkumar, Kumar, D., George, P.J., Paul, A.K.

SPIE-The International Society for Optical Engineering
8 国際会議録 Plasma Immersion Ion Implantation of Nitrogen into Porous Silicon Layers

Manuaba,A., Pinter,I., Szilagyi,E., Battistig,G., Ortega,C., A, Grosman, Amsel,G.

Trans Tech Publications
3 国際会議録 Enhancement of diffusion barrier properties of Ta by plasma immersion ion implantation

Kumar, M., Kumar, R., Kumar, D., Raole, P.M., George, P.J., Gupta, S.B., Paul, D.K.

SPIE - The International Society of Optical Engineering
9 国際会議録 Nitrogen Implantation and Diffusion in Silicon

Adam, L. S., Law, M. E., Dokumaci, O., Haddara, Y., Murthy, C., Park, H., Hegde, S., Chidambarrao, D., Mollis, S., …

MRS - Materials Research Society
4 国際会議録 X-Window Based Semiconductor Lithography and Etching Process Simulator

Chari,K.S., Rajkumar

SPIE - The International Society for Optical Engineering
10 国際会議録 Nutridation of thin metal layers by plasma immersion ion implantation for diffusion barrier applications [6037-56]

Kumar M., Kumar D.

SPIE - The International Society of Optical Engineering
5 国際会議録 PLASMA IMMERSION ION IMPLANTATION FOR IMPURITY GETTERING IN SILICON

Wong, H., Qian, X. Y., Cheung, N. W., Lieverman, M. A., Brown, I. G., Yu, K. M.

Materials Research Society
11 国際会議録 Fabrication of embedded conductive layer in polymer by plasma immersion ion implantation

P. C. T. Ha, Z. J. Han, B. K. Tay

SPIE - The International Society of Optical Engineering
6 国際会議録 Nitrogen Implantation Effects on Ultra-Thin Gate Oxide Grown on Nitrogen-Implanted Silicon

Nam, I.-H., Hong, S.I., Sim, J.S., Park, B.-G., Lee, J.D., Lee, S.-W., Kang, M.-S., Kim, Y.-W., Suh, K.-P.

Electrochemical Society
12 国際会議録 Silicon Oxide and Silicon Nitride Thin Film Deposition using RF Magnetron Sputtering

Kumar,Mahesh, Ahmad,S., George,P.J., Yadav,M.S.

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12