Low-energy ion implantation-induced control of InP-based heterostructure properties
- 著者名:
Aimez,V. ( Univ. de Sherbrooke ) Beauvais,J. Drouin,D. Beerens,J. Morris,D. Jandl,S. - 掲載資料名:
- Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001, San Diego, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4468
- 発行年:
- 2001
- 開始ページ:
- 95
- 終了ページ:
- 104
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441829 [0819441821]
- 言語:
- 英語
- 請求記号:
- P63600/4468
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
High-quality photonic device fabrication using low-energy-ion-implantation-induced intermixing
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
MRS - Materials Research Society |
SPIE - The International Society for Optical Engineering |
Materials Research Society |