Ion beam nanosmoothing of sapphire and silicon carbide surfaces
- 著者名:
Fenner,D.B. ( Epion Corp. ) DiFilippo,V. Bennett,J.A. Tetreault,T.G. Hirvonen,J.K. Feldman,L.C. - 掲載資料名:
- Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001, San Diego, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4468
- 発行年:
- 2001
- 開始ページ:
- 17
- 終了ページ:
- 24
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441829 [0819441821]
- 言語:
- 英語
- 請求記号:
- P63600/4468
- 資料種別:
- 国際会議録
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