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Multiple-surface phase-shifting interferometry

著者名:
Deck,L.L. ( Zygo Corp. )  
掲載資料名:
Optical manufacturing and testing IV : 31 July-2 August 2001, San Diego, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4451
発行年:
2001
開始ページ:
424
終了ページ:
431
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441652 [0819441651]
言語:
英語
請求記号:
P63600/4451
資料種別:
国際会議録

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