Fabrication of integrated diffractive micro-optics for MEMS applications
- 著者名:
Senesac,L.R. ( Univ. of Tennessee ) Farahi,R.H. Corbeil,J.L. Earl,D.D. Rajic,S. Datskos,P.G. - 掲載資料名:
- Optical manufacturing and testing IV : 31 July-2 August 2001, San Diego, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4451
- 発行年:
- 2001
- 開始ページ:
- 295
- 終了ページ:
- 305
- 総ページ数:
- 11
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441652 [0819441651]
- 言語:
- 英語
- 請求記号:
- P63600/4451
- 資料種別:
- 国際会議録
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