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Design and detection of superprecision positioning stage with nanometer resolution

著者名:
掲載資料名:
Optomechanical design and engineering 2001 : 2-3 August 2001, San Diego, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4444
発行年:
2001
開始ページ:
350
終了ページ:
357
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441584 [0819441589]
言語:
英語
請求記号:
P63600/4444
資料種別:
国際会議録

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