Precise proximity correction for fabricating chirped diffraction gratings with direct-writing electron-beam lithography

Precise proximity correction for fabricating chirped diffraction gratings with direct-writing electron-beam lithography

著者名:

Okano,M. ( Osaka Science and Technology Ctr. )
Yotsuya,T.
Hirai,Y.
Kikuta,H.
Yamamoto,K.

掲載資料名:

Lithographic and Micromachining Techniques for Optical Component Fabrication

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4440

発行年:

2001

開始ページ:

268

終了ページ:

276

総ページ数:

9

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819441546 [0819441546]

言語:

英語

請求記号:

P63600/4440

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012154
シリーズID:	PA00000029
会議名:	Optics & Photonics : Lithographic and micromachining techniques for optical component fabrication
回次:	2001
会議開催地:	San Diego, CA, USA
会議開催年:	2001.07.29-2001.07.30

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