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Six-beam high-power KrF excimer laser system with energy of 100 J/23 ns

著者名:
Shan,Y. ( China Institute of Atomic Energy )
Wang,N.
Ma,W.
Yang,D.
Wang,X.
Ma,J.
Jang,X.
Gong,K.
Gao,H.
Tang,X.
Tao,Y.
さらに 6 件
掲載資料名:
ECLIM 2000 : 26th European Conference on Laser Interaction with Matter, 12-16 June, 2000, Prague, Czech Republic
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4424
発行年:
2000
開始ページ:
104
終了ページ:
107
総ページ数:
4
出版情報:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441317 [0819441317]
言語:
英語
請求記号:
P63600/4424
資料種別:
国際会議録

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