Blank Cover Image

(Sub-) 100-nm gate patterning using 248-nm alternating PSM

著者名:
掲載資料名:
Photomask and Next-Generation Lithography Mask Technology VIII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4409
発行年:
2001
巻:
4409
開始ページ:
61
終了ページ:
69
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441119 [0819441112]
言語:
英語
請求記号:
P63600/4409
資料種別:
国際会議録

類似資料:

Vandenberghe,G.N., Driessen,F., Adrichem,P.J.van, Ronse,K., Li,J., Karklin,L.

SPIE-The International Society for Optical Engineering

Vandenberghe,G., Marschner,T., Ronse,K., Socha,R.J., Dusa,M.V.

SPIE - The International Society for Optical Engineering

Kim,Y.-C., Vandenberghe,G.N., Verhaegen,S., Ronse,K.

SPIE-The International Society for Optical Engineering

Lucas,K.D., Word,J.C., Vandenberghe,G.N., Verhaegen,S., Jonckheere,R.M.

SPIE-The International Society for Optical Engineering

Jonckheere,R.M., Vandenberghe,G.N., Wiaux,V., Verhaegen,S., Ronse,K.

SPIE-The International Society for Optical Engineering

Vandenberghe,G.N., Kim,Y.-C., Delvaux,C., Lucas,K.D., Choi,S.-J., Ercken,M., Ronse,K., Vleeming,B.

SPIE-The International Society for Optical Engineering

Verhaegen, S., Vandenberghe, G., Jonckheere, R.M., Ronse, K.G.

SPIE-The International Society for Optical Engineering

Fritze,M., Tyrrell,B., Astolfi,D.K., Davis,P., Wheeler,B., Mallen,R., Jarmolowicz,J., Cann,S.G., Chan,D.Y., Rhyins,P.D., …

SPIE-The International Society for Optical Engineering

Schenau,K.van Ingen, Vleeming,B., Ansem,W.F.Gehoel-van, Wong,P., Vandenberghe,G.N.

SPIE-The International Society for Optical Engineering

Randall,J., Tritchkov,A., Jonckheere,R., Jaenen,P., Ronse,K.

SPIE-The International Society for Optical Engineering

Pforr, R., Ahrens, M., Dettmann, W., Hennig, M., Koehle, R., Ludwig, B., Morgana, N., Thiele, J.

SPIE-The International Society for Optical Engineering

Philipsen, V., Jonckheere, R.M.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12