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Thermally excited SiN beam resonant pressure sensor

著者名:
Chen,D. ( Institute of Electronics )
Cui,D.
Yu,Z.
Wang,L.
Cui,Z.
Xia,S.
さらに 1 件
掲載資料名:
Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4408
発行年:
2001
開始ページ:
548
終了ページ:
554
総ページ数:
7
出版情報:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441096 [0819441090]
言語:
英語
請求記号:
P63600/4408
資料種別:
国際会議録

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