Microscanner actuated by double PZT thin film

Microscanner actuated by double PZT thin film

著者名:

Zhang,L. ( National Institute of Advanced Industrial Science and Technology )
Lin,W.-M.
Maeda,R.

掲載資料名:

Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4408

発行年:

2001

開始ページ:

528

終了ページ:

534

総ページ数:

7

出版情報:

Bellingham, Washington: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819441096 [0819441090]

言語:

英語

請求記号:

P63600/4408

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012124
シリーズID:	PA00000029
会議名:	Design, Test, Integration, and Packaging of MEMS/MOEMS
回次:	2001
会議開催地:	Cannes, France
会議開催年:	2001.04.25-2001.04.27

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