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Coplanar waveguides on SOI and OPS substrates

著者名:
Gamble,H.S. ( Queen's Univ. of Belfast )
Leong,K.O.
Raza,S.H.
Armstrong,B.M.
Mitchell,S.J.N.
Yang,S.
Fusco,V.F.
Stewart,J.A.C.
さらに 3 件
掲載資料名:
MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4407
発行年:
2001
開始ページ:
363
終了ページ:
371
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441089 [0819441082]
言語:
英語
請求記号:
P63600/4407
資料種別:
国際会議録

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