Microscale effects of silicon-on-glass micromechanical devices: experimental results and 3D finite element modeling
- 著者名:
Borovkov,A.I. ( St. Petersburg State Technical Univ. ) Pyatishev,E.N. Lurie,M.S. Pereyaslavets,E.V. Lunev,V.P. Kazakin,A.N. Popova,I.V. Lestiev,A.M. - 掲載資料名:
- Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4348
- 発行年:
- 2000
- 開始ページ:
- 361
- 終了ページ:
- 368
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440372 [081944037X]
- 言語:
- 英語
- 請求記号:
- P63600/4348
- 資料種別:
- 国際会議録
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SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |