Blank Cover Image

Microscale effects of silicon-on-glass micromechanical devices: experimental results and 3D finite element modeling

著者名:
Borovkov,A.I. ( St. Petersburg State Technical Univ. )
Pyatishev,E.N.
Lurie,M.S.
Pereyaslavets,E.V.
Lunev,V.P.
Kazakin,A.N.
Popova,I.V.
Lestiev,A.M.
さらに 3 件
掲載資料名:
Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4348
発行年:
2000
開始ページ:
361
終了ページ:
368
総ページ数:
8
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440372 [081944037X]
言語:
英語
請求記号:
P63600/4348
資料種別:
国際会議録

類似資料:

Borovkov,A.I., Pyatishev,E.N., Lurie,M.S., Akulshin,Y.D., Pereyaslavets,E.V.

SPIE-The International Society for Optical Engineering

Borovkov,A.I., Pyatishev,E.N., Lurie,M.S., Akulshin,Y.D., Pereyaslavets,E.V.

SPIE-The International Society for Optical Engineering

Borovkov,A.I., Misnik,Yu.Y.

SPIE - The International Society for Optical Engineering

Borovkov,A.I., Pyatishev,E.N., Lurie,M.S., Korshunov,A.V., Akulshin,Y.D., Sabadash,V.O., Smolnikov,B.A.

SPIE-The International Society for Optical Engineering

Borovkov,A.I., Avdeev,I., Artemyev,A.

SPIE - The International Society for Optical Engineering

Borovkov,A.I., Pyatishev,E.N., Lurie,M.S., Korshunov,A.V., Akulshin,Y.D., Dolganov,A.G., Sabadash,V.O.

SPIE-The International Society for Optical Engineering

Ignatyev,M.B., Korshunov,A.V., Pyatishev,E.N.

SPIE - The International Society for Optical Engineering

5 国際会議録 Some aspect of MEMS technology

Pyatishev,E.N., Lurie,M.S., Popova,I.V.

SPIE - The International Society for Optical Engineering

Popova, E.V., Kutulya, L.A., Vashchenko, V.V., Pivnenko, M.N., Krivoshey, A.I., Fedoryako, A.P.

SPIE-The International Society for Optical Engineering

Borovkov,A.I., Kiylo,O.L., Avdeev,I.V.

SPIE - The International Society for Optical Engineering

Klimovskaya, A.I., Lytvyn, P.M., Grigor'ev, N., Ostrovsky, I., Prokopenko, I.V., Kostyukevich, S.A.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12