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3D finite element modeling of the micromachined microphone with corrugated diaphragm

著者名:
Borovkov,A.I. ( St. Petersburg State Technical Univ. )
Pyatishev,E.N.
Lurie,M.S.
Korshunov,A.V.
Akulshin,Y.D.
Sabadash,V.O.
Smolnikov,B.A.
さらに 2 件
掲載資料名:
Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4348
発行年:
2000
開始ページ:
355
終了ページ:
360
総ページ数:
6
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440372 [081944037X]
言語:
英語
請求記号:
P63600/4348
資料種別:
国際会議録

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