3D finite element modeling of micromachined pressure sensor
- 著者名:
- Borovkov,A.I. ( St. Petersburg State Technical Univ. )
- Pyatishev,E.N.
- Lurie,M.S.
- Akulshin,Y.D.
- Pereyaslavets,E.V.
- 掲載資料名:
- Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4348
- 発行年:
- 2000
- 開始ページ:
- 338
- 終了ページ:
- 347
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440372 [081944037X]
- 言語:
- 英語
- 請求記号:
- P63600/4348
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
11
国際会議録
Hybrid finite element-boundary element method for vector modeling diffractive optical elements
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |