Application of full-chip level optical proximity correction to memory device with sub-0.10-μm design rule and ArF lithography
- 著者名:
Yune,H.-S. ( Hyundai Electronics Industries Co., Ltd. ) Kim,H.-B. Kim,W.-H. Ahn,C.-N. Ham,Y.-M. Shin,K.-S. - 掲載資料名:
- Optical Microlithography XIV
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4346
- 発行年:
- 2001
- 巻:
- 4346
- パート:
- One of Two Parts
- 開始ページ:
- 241
- 終了ページ:
- 250
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440327 [0819440329]
- 言語:
- 英語
- 請求記号:
- P63600/4346
- 資料種別:
- 国際会議録
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9
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Trench pattern lithography for 0.13- and 0.10-μm logic devices at 248- and 193-nm wavelengths
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