Development of full-fill bottom bottom antireflective coatings for dual-damascene process
- 著者名:
Wang,Y. ( Brewer Science, Inc. ) Wu,X. Xu,G. Lamb Ⅲ,J.E. Sullivan,J. Claypool,J.B. Backus,J. Trautman,S. Shao,X. Takei,S. Sone,Y. Mizusawa,K. Fukuro,H. - 掲載資料名:
- Advances in Resist Technology and Processing XVIII
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4345
- 発行年:
- 2001
- 巻:
- 4345
- パート:
- Two of Two Parts
- 開始ページ:
- 838
- 終了ページ:
- 845
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440310 [0819440310]
- 言語:
- 英語
- 請求記号:
- P63600/4345
- 資料種別:
- 国際会議録
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5
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