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Capacitive micropressure sensors with underneath readout circuit using a standard CMOS process

著者名:
掲載資料名:
Smart structures and materials 2001 : smart electronics and MEMS : 5-7 March, 2001, Newport Beach, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4334
発行年:
2001
開始ページ:
336
終了ページ:
344
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440204 [0819440205]
言語:
英語
請求記号:
P63600/4334
資料種別:
国際会議録

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