Diamond-based deep-UV sensors for lithography applications

Diamond-based deep-UV sensors for lithography applications

著者名:

Whitfield,M.D. ( Exitech Ltd. )

掲載資料名:

Laser Applications in Microelectronic and Optoelectronic Manufacturing VI

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4274

発行年:

2001

開始ページ:

40

終了ページ:

47

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819439529 [0819439525]

言語:

英語

請求記号:

P63600/4274

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00011990
シリーズID:	PA00000029
会議名:	SPIE LASE : Laser applications in microelectronic and optoelectronic manufacturing
回次:	2001 : 6th
会議開催地:	San Jose, CA, USA
会議開催年:	2001.01.22-2001.01.24

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