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Enhancement of spatial resolution of microfabricated colummns using localized electrochemical deposition

著者名:
掲載資料名:
Smart electronics and MEMS II : 13-15 December 2000, Melbourne, Australia
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4236
発行年:
2000
開始ページ:
260
終了ページ:
271
総ページ数:
12
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439109 [081943910X]
言語:
英語
請求記号:
P63600/4236
資料種別:
国際会議録

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