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"Ferroelectric Pb(Zr0.53, Ti0.47)O3 thin films for smart MEMS"

著者名:
掲載資料名:
Smart structures and devices : 13-15 December 2000, Melbourne, Australia
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4235
発行年:
2000
開始ページ:
40
終了ページ:
47
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439093 [0819439096]
言語:
英語
請求記号:
P63600/4235
資料種別:
国際会議録

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