Control of stresses in highly doped multilayer polysilicon structures used in MEMS applications
- 著者名:
- 掲載資料名:
- Smart materials
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4234
- 発行年:
- 2000
- 開始ページ:
- 232
- 終了ページ:
- 238
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819439086 [0819439088]
- 言語:
- 英語
- 請求記号:
- P63600/4234
- 資料種別:
- 国際会議録
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