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Process monitoring of LPCVD silicon nitride and polysilicon by variable-angle spectroscopic ellipsometry

著者名:
掲載資料名:
Micromachining and Microfabrication
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4230
発行年:
2000
開始ページ:
231
終了ページ:
240
総ページ数:
10
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439024 [0819439029]
言語:
英語
請求記号:
P63600/4230
資料種別:
国際会議録

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