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Reactive ion etching of CVD diamond films for MEMS applications

著者名:
Ding,G.-F.
Zhao,X.-L.
Yu,A.
Yang,C.-S.
Cai,B.
Yao,X.
さらに 1 件
掲載資料名:
Micromachining and Microfabrication
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4230
発行年:
2000
開始ページ:
224
終了ページ:
230
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439024 [0819439029]
言語:
英語
請求記号:
P63600/4230
資料種別:
国際会議録

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