MEMS variable capacitor for one-chip rf front end
- 著者名:
- 掲載資料名:
- Micromachining and Microfabrication
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4230
- 発行年:
- 2000
- 開始ページ:
- 26
- 終了ページ:
- 33
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819439024 [0819439029]
- 言語:
- 英語
- 請求記号:
- P63600/4230
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering | |
ESA Publications Division |
12
国際会議録
Characterization of MIS Capacitor of BST Thin Films Deposited on Si by RF Magnetron Sputtering
MRS - Materials Research Society |