Advanced Silicon Wafers for 0.18 μm Design Rule and Beyond: Epi and fFLASH!
- 著者名:
Schmolke,R. Blietz,M. Schauer,R. Zemke,D. Oelkrug,H. Ammon,W.v. Lambert,U. Graf,D. - 掲載資料名:
- High Purity Silicon VI : proceedings of the sixth International Symposium
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4218
- 発行年:
- 2000
- 開始ページ:
- 3
- 終了ページ:
- 18
- 総ページ数:
- 16
- 出版情報:
- Pennington, N.J. — Bellingham, Wash.: Electrochemical Society — SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9781566772846 [1566772842]
- 言語:
- 英語
- 請求記号:
- P63600/4218
- 資料種別:
- 国際会議録
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4
国際会議録
The Impact of Crystal Quality by Delineation of COP and the Impact on the Silicon Wafer Surface
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