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Realization of mass prouction for 130-nm node and future application for high transmission using ZrSi-based attenuated phase-shift mask in ArF lithography

著者名:
Ii,T.
Saga,T.
Hattori,Y.
Ohshima,T.
Otaki,M.
Iwakata,M.
Haraguchi,T.
Kanayama,K.
Yamazaki,T.
Fukuhara,N.
Matsuo,T.
さらに 6 件
掲載資料名:
20th Annual BACUS Symposium on Photomask Technology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4186
発行年:
2000
開始ページ:
297
終了ページ:
308
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438492 [0819438499]
言語:
英語
請求記号:
P63600/4186
資料種別:
国際会議録

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