Materials impacts on micro-opto-electro-mechanical systems

Materials impacts on micro-opto-electro-mechanical systems

著者名:: Cowan,W.D.
掲載資料名:: MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA
シリーズ名:: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:: 4178
発行年:: 2000
開始ページ:: 30
終了ページ:: 41
総ページ数:: 12
出版情報:: Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819438348 [0819438340]
言語:: 英語
請求記号:: P63600/4178
資料種別:: 国際会議録

詳細

TDL書誌ID:	ZA00011897
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : MOEMS and Miniaturized Systems
回次:	2000
会議開催地:	Santa Clara, CA, USA
会議開催年:	2000.09.18-2000.09.20

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