Blank Cover Image

Planar latch-up microactuator driven by thermoelastic force

著者名:
掲載資料名:
Micromachined Devices and Components VI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4176
発行年:
2000
開始ページ:
264
終了ページ:
279
総ページ数:
16
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438324 [0819438324]
言語:
英語
請求記号:
P63600/4176
資料種別:
国際会議録

類似資料:

1 国際会議録 Bistable planar polysilicon microactuator with shallow arch-shaped leaf springs

Lee,J.H., Lee,M.L., Jang,W.I., Choi,C.A., Joo,J.W.

SPIE - The International Society for Optical Engineering
7 国際会議録 Formation of low-stress multilayered thick polysilicon films for fabrication of microsystems

Choi,C.-A., Jang,W.-I., Lee,M.-L., Kim,Y.T.

SPIE-The International Society for Optical Engineering
2 国際会議録 Micromachined silicon actuators with low driving voltage and high accuracy for optical switches and tunable filters

Lee,J.H., Lee,M.L., Jang,W.I., Choi,C.A., Kim,K.

SPIE - The International Society for Optical Engineering
8 国際会議録 Control and modeling of stress in multistacked polysilicon films considering oxidation effect

Lee,C.S., Jang,W.I., Choi,C.A., Hong,Y.S., Lee,J.H., No,K., Wee,D.M.

SPIE-The International Society for Optical Engineering
3 国際会議録 Dry release process of anhydrous HF gas-phase etching for the fabrication of a vibrating microgyroscope

Jang,W.I., Choi,C.A., Hong,Y.S., Jun,C.H., Kim,Y.T., Lee,J.H.

SPIE - The International Society for Optical Engineering
9 国際会議録 Fabrication of highly sensitive thermal microflow sensor with surface-micromachined vacuum platform for gas and liquid applications

Jun,C.-H., Choi,C.-A., Jang,W.I., Kim,Y.T.

SPIE-The International Society for Optical Engineering
4 国際会議録 Surface-micromachined electrostatic diaphragm micropump

Jang,W.I., Lee,Y.I., Choi,C.A., Jun,C.H., Kim,Y.T.

SPIE - The International Society for Optical Engineering
10 国際会議録 Silicon surface micromachining of a deep vacuum cavity structure and its application to a microflow sensor

Jun,C.-H., Choi,C.-A., Jang,W.-I., Kim,Y.T.

SPIE-The International Society for Optical Engineering
5 国際会議録 Fabrication of surface-micromachined thermally driven micropump by anhydrous HF gas-phase etching with 2-propanol

Jang,W.-I., Choi,C.-A., Lee,M.-L., Jun,C.-H., Kim,Y.T.

SPIE-The International Society for Optical Engineering
11 国際会議録 Microactuators Driven by Giant Magnetostrictive Thin Films

Lim, S.H., Choi, Y.S., Han, S.H., Kim, H.J., Moon, S., Kang, H.K., Oh, M.H., Ahn, C.H.

Electrochemical Society
6 国際会議録 Silicon surface micromachining by anhydrous HF gas-phase etching with methanol

Jang,W.I., Choi,C.A., Lee,C.S., Hong,Y.S., Lee,J.H., Baek,J.T., Kim,B.W.

SPIE-The International Society for Optical Engineering
12 国際会議録 Reverse-biased characteristics of GaAs/AlGaAs depleted optical thyristor with low depletion voltage

Choi, W.-K., Kim, D.-G., Choi, Y.-W., Lee, S., Woo, D.H., Byun, Y.T., Kim, J.H., Kim, S.H.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12