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Deep cavity-shaped diaphragm for enhancement of microphone mechanical sensitivity

著者名:
掲載資料名:
Micromachined Devices and Components VI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4176
発行年:
2000
開始ページ:
59
終了ページ:
66
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438324 [0819438324]
言語:
英語
請求記号:
P63600/4176
資料種別:
国際会議録

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