High-force 10-kN piezoresistive silicon force sensor with output independent of force distribution
- 著者名:
Zwijze,R.A.F. Wiegerink,R.J. Krijnen,G.J.M. Berenschot,J.W. Boer,M.J.de Elwenspoek,M.C. - 掲載資料名:
- Micromachined Devices and Components VI
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4176
- 発行年:
- 2000
- 開始ページ:
- 47
- 終了ページ:
- 58
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819438324 [0819438324]
- 言語:
- 英語
- 請求記号:
- P63600/4176
- 資料種別:
- 国際会議録
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11
テクニカルペーパー
Calibration of Piezoresistive Cantilever for Force Sensors Using the Nist Electrostatic Force Balance.
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