Blank Cover Image

RF MEMS microswitches design and characterization

著者名:
掲載資料名:
Materials and Device Characterization in Micromachining III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4175
発行年:
2000
開始ページ:
149
終了ページ:
157
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438317 [0819438316]
言語:
英語
請求記号:
P63600/4175
資料種別:
国際会議録

類似資料:

1 国際会議録 "Concepts, characterization, and modeling of MEMS microswitches with gold contacts in MUMPs"

Lafontan,X., Dufaza,C., Robert,M., Pressecq,F., Perez,G.

SPIE-The International Society for Optical Engineering
7 国際会議録 Microelectronics CAD education in France

Dufaza,C., Robert,M.

SPIE - The International Society for Optical Engineering
2 国際会議録 MEMS physical analysis in order to complete experimental results return

Lafontan,X., Dufaza,C., Perez,G., Pressecq,F.

SPIE - The International Society for Optical Engineering
8 国際会議録 Parametric yield optimization of MEMS

Delauche, F., Affour, B., Dufaza, C.

SPIE-The International Society for Optical Engineering
3 国際会議録 Physical and reliability issues in MEMS microrelays with gold contacts

Lafontan,X., Pressecq,F., Perez,G., Dufaza,C., Karam,J.-M.

SPIE-The International Society for Optical Engineering
9 国際会議録 High-frequency rf microswitches using MEMS-integrated fabrication process

Liu,A.Q., Ng,G.I., Lam,Y.L., Chew,S.T., Ting,S.K.

SPIE-The International Society for Optical Engineering
4 国際会議録 CNES reliability approach for the qualification of MEMS for space

Pressecq,F., Lafontan,X., Perez,G., Fortea,J.-P.

SPIE-The International Society for Optical Engineering
10 テクニカルペーパー MEMS Reliability: From Experimental Results to the Understanding of Physical Phenomena

Pressecq, F., Schmitt, P., Veyrie, D., Duong, Q., Lafontan, X., Lellouchi, D.

American Institute of Aeronautics and Astronautics
5 国際会議録 Environmental test bench for reliability studies: influence of the temperature on rf switches with metallic membranes

Lafontan, X., Le Touze, C., Wenk, B., Kolesnik, I., Pressecq, F., Perez, G., Nicot, J.-M., Dardalhon, M., Rigo, S.

SPIE-The International Society for Optical Engineering
11 テクニカルペーパー Space Microsystems and Reliability: The Contribution of Behavioral Modeling

Schmitt, P., Nicot, J., Pressecq, F., Lafontan, X., Oudea, C., Esteve, D.

American Institute of Aeronautics and Astronautics
6 国際会議録 Reliability issues of an accelerometer under environmental stresses

Schmitt, P., Pressecq, F., Perez, G., Lafontan, X., Nicot, J.M., Esteve, D., Fourniols, J.Y., Camon, H., Oudea, C.

SPIE - The International Society of Optical Engineering
12 国際会議録 Fabrication and characterization of ohmic contacting RF MEMS switches

Dyck, C.W., Plut, T.A., Nordquist, C.D., Finnegan, P.S., Austin, F., Reines, I.C., Goldsmith, C.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12