Development of TMAH anisotropic etching manufacturing process for MEMS
- 著者名:
Tsaur,J. Yang,S. Du,C.-H. Lin,Z. Huang,C. Lee,C. - 掲載資料名:
- Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4174
- 発行年:
- 2000
- 開始ページ:
- 142
- 終了ページ:
- 153
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819438300 [0819438308]
- 言語:
- 英語
- 請求記号:
- P63600/4174
- 資料種別:
- 国際会議録
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