High-resolution soft x-ray microscopy

High-resolution soft x-ray microscopy

著者名:

Chao,W.

掲載資料名:

Soft X-ray and EUV imaging systems : 3-4 August 2000, San Diego, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4146

発行年:

2000

開始ページ:

171

終了ページ:

175

総ページ数:

5

出版情報:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819437914 [0819437913]

言語:

英語

請求記号:

P63600/4146

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00011871
シリーズID:	PA00000029
会議名:	Optics & Photonics : Soft X-Ray and EUV Imaging Systems
回次:	2000
会議開催地:	San Diego, CA, USA
会議開催年:	2000.08.03-2000.08.04

類似資料:

1 国際会議録 Experimental analysis of high-resolution soft x-ray microscopy Chao,W., Anderson,E.H., Denbeaux,G., Harteneck,B.D., Pearson,A.L., Olynick,D.L., Schneider,G., Attwood,D.T. SPIE-The International Society for Optical Engineering	7 国際会議録 Nanoscale pattern transfer for templates, NEMS, and nano-optics D. L. Olynick, J. A. Liddle, B. D. Harteneck, S. Cabrini, I. W. Rangelow SPIE - The International Society of Optical Engineering
2 国際会議録 XM-1: the high-resolution soft x-ray microscope at the Advanced Light Source Pearson,A.L., Chao,W., Denbeaux,G., Eimueller,T., Fischer,P., Johnson,L.E., Koehler,M., Larabell,C., Gros,M.A.Le, … SPIE-The International Society for Optical Engineering	8 国際会議録 New nanofabrication technique using overlay for 15-nm zone plate (Invited Paper) [6110-13] Chao, W, Harteneck, B D, Anderson, E H, Affwood, D, Liddle, J. A. SPIE - The International Society of Optical Engineering
3 国際会議録 Equivalent multilayer bandwidth and comparison between 13.4 nm and 14.4 nm for EUV throughput calculation Chao,W., Gullikson,E.M., Jr.,D.T.Attwood SPIE-The International Society for Optical Engineering	9 国際会議録 HIGH RESOLUTION MICROSCOPY OF Pd/InP INTERFACES Palmer, J. W., Anderson, W. A., Hoelzer, D. T. MRS - Materials Research Society
4 国際会議録 Static microfield printing at the Advanced Light Source with the ETS Set-2 optic Naulleau, P.P., Goldberg, K.A., Anderson, E.H., Attwood, D.T., Batson, P.J., Bokor, J., Denham, P., Gullikson, E.M., … SPIE-The International Society for Optical Engineering	10 国際会議録 EUV imaging with a 13 nm tabletop laser reachessub-38 nm spatial resolution [6151-33] Vaschenko, G, Brizuela, F, Brewer, C, Larotonda, M A, Wang, Y, Luther, B M, Marconi, M C, Rocca, J J, Menoni, C S, Chao, … SPIE - The International Society of Optical Engineering
5 国際会議録 Static EUV micro-exposures using the ETS Set-2 optics Naulleau, P.P., Goldberg, K.A., Anderson, E.H., Bokor, J., Harteneck, B.D., Jackson, K.H., Olynick, D.L., Salmassi, F., … SPIE-The International Society for Optical Engineering	11 国際会議録 HIGH-RESOLUTION MICROSCOPY OF CERAMICS Carter, C.B., McKernan, S., Rasmussen, D.R., Simpson, Y.K., Summerfelt, S.R., Susnitzky, D.W., Tietz, L.A. Materials Research Society
6 国際会議録 Nanometer-scale imaging with compact soft x-ray lasers [5919-24] Brizuela, F., Vazchenko, G., Brewer, C., Grisham, M., Menoni, C. S., Mancini, H., Marconi, M. C., Rocca, J. J., Chao, … SPIE - The International Society of Optical Engineering	12 国際会議録 White-light spacial frequency multiplication using soft x rays M. Wei, E.M. Gullikson, J.H. Underwood, T.K. Gustafson, D.T. Attwood, Jr. Society of Photo-optical Instrumentation Engineers

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