"Design, fabrication, and characterization of broadhand multilayer mirrors for EUV optics at normal incidence"
- 著者名:
Wang,Z. Kun,C. Ma,Y. Chen,B. Cao,J. Zhou,Z. Chen,X. Michette,A.G. - 掲載資料名:
- Soft X-ray and EUV imaging systems : 3-4 August 2000, San Diego, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4146
- 発行年:
- 2000
- 開始ページ:
- 83
- 終了ページ:
- 90
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437914 [0819437913]
- 言語:
- 英語
- 請求記号:
- P63600/4146
- 資料種別:
- 国際会議録
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3
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Multilayer mirror design for different applications in the XUV using a versatile simulation program
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