XM-1: the high-resolution soft x-ray microscope at the Advanced Light Source
- 著者名:
Pearson,A.L. Chao,W. Denbeaux,G. Eimueller,T. Fischer,P. Johnson,L.E. Koehler,M. Larabell,C. Gros,M.A.Le Yager,D. Jr.,D.T.Attwood - 掲載資料名:
- Soft X-ray and EUV imaging systems : 3-4 August 2000, San Diego, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4146
- 発行年:
- 2000
- 開始ページ:
- 54
- 終了ページ:
- 59
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437914 [0819437913]
- 言語:
- 英語
- 請求記号:
- P63600/4146
- 資料種別:
- 国際会議録
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