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Infrared thermal imaging of SiNx membranes

著者名:
掲載資料名:
Infrared technology and applications XXVI : 30 July - 3 August 2000, San Diego, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4130
発行年:
2000
開始ページ:
835
終了ページ:
841
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437754 [0819437751]
言語:
英語
請求記号:
P63600/4130
資料種別:
国際会議録

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